JPH0615441Y2 - 磁気浮上装置 - Google Patents
磁気浮上装置Info
- Publication number
- JPH0615441Y2 JPH0615441Y2 JP916089U JP916089U JPH0615441Y2 JP H0615441 Y2 JPH0615441 Y2 JP H0615441Y2 JP 916089 U JP916089 U JP 916089U JP 916089 U JP916089 U JP 916089U JP H0615441 Y2 JPH0615441 Y2 JP H0615441Y2
- Authority
- JP
- Japan
- Prior art keywords
- mover
- stator
- magnets
- electromagnets
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005339 levitation Methods 0.000 title claims description 22
- 230000005389 magnetism Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP916089U JPH0615441Y2 (ja) | 1989-01-28 | 1989-01-28 | 磁気浮上装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP916089U JPH0615441Y2 (ja) | 1989-01-28 | 1989-01-28 | 磁気浮上装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02103701U JPH02103701U (en]) | 1990-08-17 |
| JPH0615441Y2 true JPH0615441Y2 (ja) | 1994-04-20 |
Family
ID=31215670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP916089U Expired - Lifetime JPH0615441Y2 (ja) | 1989-01-28 | 1989-01-28 | 磁気浮上装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0615441Y2 (en]) |
-
1989
- 1989-01-28 JP JP916089U patent/JPH0615441Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02103701U (en]) | 1990-08-17 |
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